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CVD Reactor Package

Included in our CVD Reactor Know-How Package (the same applies to STC Converter):

  • Multiple Run Tables (time-current-temperature-flows) for different grades of product
  • Mass balance (peak and average)
  • CVD Reactor Pand ID
  • Detailed description of each step of the logics to be configured at DCS / ESD systems
  • Filament specification and Filament Facility Design Package
  • Engineering drawings, specifications and vendor list for all CVD Reactor / STC Converter internals
  • CVD Reactor Building Arrangement
  • TCS, Hydrogen and Product specifications
  • CVD Reactor cooling system design package
  • Bell Jar Washing and Drying station design package
  • Assistance during detail design and HAZOP reviews
  • Operating and Cleaning Procedures
  • Training before Start-Up and assistance during Commissioning and Start-Up
  • Operation trouble-shooting and process fine tuning