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30 Rods STC/TCS Converter, 54 Rods CVD Reactor

54 Rods CVD Reactor Performances

  Electronic Grade Process
  Number of rods   54
  Specific Energy Consumption kWh/kg product 60(*)
  Deposition Rate kg/h 55
  Run Weight kg 3500
  Yearly Reactor Capacity t/y 350(*)
  Power Supply System Included
  Power Transformer Included
  Start-up assistance Included

(*)
More aggressive processes are available in order to reach lower specific energy consumption (up to 40 - 45 kWh/kg) and higher production rates (>400t/y) by producing a different product with dendritic morphology. If interested the customer will have the opportunity to test such processes.


30 Rods STC/TCS Converter Performances
  No of Rods    30
  Specific Energy Consumption k Wh/kg TCS < 1.7
  Conversion (STC reacted/STC fed)   > 23%
  Graphite heating rods  Specifications included
  Graphite insulating shields Specifications included
  Power Supply System Included
  Power Transformer Included
  Start-up assistance Included

  • High molar conversion efficiency
  • High gas throughput
  • Proven Design
  • Optimized engineering for cost saving
  • Guaranteed performance

Technical Characteristics and Benefits of 30 Rods STC/TCS Converter and 54 Rods CVD Reactor

  • Proven process and fabrication technologies
  • Optimized Engineering
  • High production capacity
  • Low energy consumption
  • Guaranteed performance
  • Full Training and Service Support